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Details
| Document Type: | Book |
|---|---|
| All Authors / Contributors: |
Volker Kempe |
| ISBN: | 9780521766586 0521766583 |
| OCLC Number: | 667871802 |
| Description: | xiv, 475 p. : ill. ; 26 cm. |
| Contents: | Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS -- technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index. |
| Responsibility: | Volker Kempe. |
| More information: |
Abstract:
A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors.
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