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|All Authors / Contributors:||
|Description:||xiv, 475 p. : ill. ; 26 cm.|
|Contents:||Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS --
technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index.
A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors.
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